Identification by force modulation microscopy of nanoparticles generated in vacuum arcs

Main Article Content

Mauricio Arroyave Franco
Universidad EAFIT

Keywords

force modulation, atomic force, nanoparticle, TiN, Ti. 1

Abstract

An alternative method based on force modulation microscopy (FMM) for identification of nanoparticles produced in the plasma generated by the cathode spots of vacuum arcs is presented. FMM technique is enabled for the detection of variations in the mechanical properties of a surface with high sensitiveness. Titanium nitride (TiN) coatings deposited on oriented silicon by pulsed vacuum arc process have been analyzed. AFM (Atomic Force Microscopy) and FMM images were simultaneously obtained, and in all cases it was possible to identify nanoparticle presence. Further X-ray Diffraction spectra of sample coating were taken. Existence of contaminant particles of 47 nanometers in diameter was reported.

PACS: 42.79.Wc, 68.35.Gy

Downloads

Download data is not yet available.
Abstract 518 | PDF Downloads 246

References

[1] B.K. Tay, X. Shi et al. Surface & Coatings Technology. 111, 229-233 (1999).

[2] M. Hakovirta, K.C. Walter, B. P. Wood and M. Nastasi. J. Vacuum Science Technology. A 17, 3077-3080 (1999).

[3] K. Miernik and J. Walkowicz. Surface & Coatings Technology. 125, 161-166 (2000).

[4] A. Anders. Surface & Coatings Technology. 120-121, 319-330 (1999).

[5] M. Keidar, R. Aharonov and I. I. J. Beilis. Vacuum Science Technology. A 17, 3067-3073 (1999).

[6] B. J¨utttner and V. F. Puchkarev. Cathode Spots in: R.L. Boxman, P. J. Martin and D. M. Sanders (Eds.), Handbook of Vacuum

[7] Arc Science and Technology, Noyes, NJ, 139 (1995).

[8] M. Arroyave, L. Álvarez y A. Devia. AIP Conferences Proceedings.

Article Sidebar

PDF

Article Details

How to Cite
Arroyave Franco, M. (2006). Identification by force modulation microscopy of nanoparticles generated in vacuum arcs. Ingeniería Y Ciencia, 2(3), 65–71. Retrieved from https://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/486
Issue
Vol. 2 No. 3 (2006)
Section
Articles
Supporting Agencies
Author Biography

Mauricio Arroyave Franco, Universidad EAFIT

Ingeniero electrónico

Authors who publish with this journal agree to the following terms:

  • Authors retain copyright and grant the journal right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.
  • Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgement of its initial publication in this journal.
  • Authors are permitted and encouraged to post their work online (e.g., in institutional repositories or on their website) prior to and during the submission process, as it can lead to productive exchanges, as well as earlier and greater citation of published work (See The Effect of Open Access).