Methods Employed in Optical Emission Spectroscopy Analysis: a review
Main Article Content
Keywords
OES, plasma parameters, elemental determination, line intensity, broadening, shifting
Abstract
In this work, different methods employed for the analysis of emission spectra are presented. The proposal is to calculate the excitation temperature (Texc), electronic temperature (Te) and electron density (ne) for several plasma techniques used in the growth of thin films. Some of these techniques include magnetron sputtering and arc discharges. Initially, some fundamental physical principles that support the Optical Emission Spectroscopy (OES) technique are described; then, some rules to consider during the spectral analysis to avoid ambiguities are listed. Finally, some of the more frequently used spectroscopic methods for determining the physical properties of plasma are described.
PACS: 52.25.Dg, 31.15.V-
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References
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http://dx.doi.org/10.1016/j.surfcoat.2006.09.011
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http://dx.doi.org/10.1016/S0169-4332(02)00023-5
C. Seidel, H. Kopf, B. Gotsmann, T. Vieth, H. Fuchs, and K. Reihs, "A plasma treated and Al metallised polycarbonate: a XPS, mass spectroscopy and SFM study," Applied Surface Science, p. 19–33, 1999.
http://dx.doi.org/10.1016/S0169-4332(99)00012-4
K. Warner and G. M.Hieftje, "Review: Thomson scattering from analytical plasmas," Spectrochimica Acta Part B: Atomic Spectroscopy, p. 201–241, 2002.
http://dx.doi.org/10.1016/S0584-8547(01)00372-X
T. Duguet, V. Fournée, J. Dubois, and T. Belmonte, "Study by optical emission spectroscopy of a physical vapour deposition process for the synthesis of complex AlCuFe(B) coatings," Surface and Coatings Technology, pp. 9–14, 2010.
http://dx.doi.org/10.1016/j.surfcoat.2010.05.030
N. H. Bings, A. Bogaerts, and J. A. C. Broekaert, "Atomic Spectroscopy," Analytical Chemistry, p. 4317–4347, 2008.
http://dx.doi.org/10.1021/ac8006297
L. H. Allen, Astrophysics: The Atmosphere of the Sun and Stars. The Ronald Press Co, 1963.
M. de Jong and N. Rowlands, "Proton beam diagnostics using optical spectroscopy, Nuclear Instruments and Methods in Physics Research Section B," Beam Interactions with Materials and Atoms, pp. 822–824, 1985.
G. Zambrano, H. Riascos, P. Prieto, E. Restrepo, A. Devia, and C. Rincón, "Optical emission spectroscopy study of r.f. magnetron sputtering discharge used for multilayers thin film deposition," Surface and Coatings Technology, p. 144–149, 2003.
http://dx.doi.org/10.1016/S0257-8972(03)00339-6
L. García, E. Restrepo, H. Jiménez, H. Castillo, R. Ospina, V. Benavides, and A. Devia, "Diagnostics of pulsed vacuum arc discharges by optical emission spectroscopy and electrostatic double-probe measurements," Vacuum, p. 411–416, 2006.
http://dx.doi.org/10.1016/j.vacuum.2006.06.005
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http://dx.doi.org/10.1016/j.surfcoat.2006.02.030
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http://dx.doi.org/10.1016/S0257-8972(01)01601-2
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http://dx.doi.org/10.1016/S0257-8972(99)00109-7
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J. Aguilera and C. Aragón, "Multi-element Saha–Boltzmann and Boltzmann plots in laser-induced plasmas," Atomic Spectroscopy, p. 378–385, 2007.
E. Garber, "Some reactions to Planck's law," Studies in History and Philosophy of Science, pp. 89–126, 1976.
http://dx.doi.org/10.1016/0039-3681(76)90013-3
M. Numano, "Criteria for local thermodynamic equilibrium distributions of populations of excited atoms in a plasma," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 311–317, 1990.
http://dx.doi.org/10.1016/0022-4073(90)90020-7
J. R. J.D. Hey, C.C. Chu, "Partial local thermal equilibrium in a low temperature hydrogen plasma," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 371–387, 1999.
http://dx.doi.org/10.1016/S0022-4073(98)00110-1
R. McWhirter, Plasma Diagnostic Techniques. Academic Press, 1965.
C. Aragón and J. Aguilera, "Characterization of laser induced plasmas by optical emission spectroscopy: A review of experiments and methods," Atomic Spectroscopy, p. 893–916, 2008.
G. Cristoforetti, A. D. Giacomo, M. Dell'Aglio, S. Legnaioli, E. Tognoni, V. Palleschi, and N. Omenetto, "Local Thermodynamic Equilibrium in Laser-Induced Breakdown Spectroscopy: Beyond the McWhirter criterion," Atomic Spectroscopy, p. 86–95, 2010.
Q. A. Wang and A. L. Méhauté, "Nonextensive black-body distribution function and Einstein's coefficients A and B," Physics Letters, pp. 301–306, 1998.
http://dx.doi.org/10.1016/S0375-9601(98)00216-3
L. Cadwell and L. Huwel, "Time-resolved emission spectroscopy in lasergenerated argon plasmas—determination of Stark broadening parameters," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 579–598, 2004.
http://dx.doi.org/10.1016/S0022-4073(03)00106-7
J. H. Dijkstra and C. D. Vries, "Differences in natural widths of conversion lines," Nuclear Physics, pp. 524–531, 1961.
http://dx.doi.org/10.1016/0029-5582(61)90280-2
P. L. Lee, Y. H. Chou, J.-C. Hsieh, and H. K. Chiang, "An improved spectral width Doppler method for estimating Doppler angles in flows with existence of velocity gradients," Ultrasound in Medicine & Biology, pp. 1229–1245, 2006.
http://dx.doi.org/10.1016/j.ultrasmedbio.2006.05.003
V. Milosavljevic, V. Zigman, and S. Djenize, "Stark width and shift of the neutral argon 425.9 nm spectral line," Atomic Spectroscopy, p. 1423– 1429, 2004.
R. Parsons, "A method for the correction of instrumental broadening of a littrow mount grating spectrometer," Infrared Physics & Technology, pp. 197– 198, 1968.
http://dx.doi.org/10.1016/0020-0891(68)90009-2
V. . N. I. of Standards Technology (NIST). (1999).
R. L. Kurucz. (1995) Harvard-Smithsonian Center for Astrophysics.
J. Zhang, L. Liu, and X. D. T. Ma, "Rotational temperature of nitrogen glow discharge obtained by optical emission spectroscopy," Molecular and Biomolecular Spectroscopy, p. 1915–1922, 2002.
J. van Kranendonk, "Rotational and vibrational energy bands in solid hydrogen," Physica, 1959.
http://dx.doi.org/10.1016/0031-8914(59)90027-8
J. Koput, S. Carter, and N. C. Handy, "The vibrational rotational energy levels of silanone," Chemical Physics Letters, pp. 1–9, 1999.
http://dx.doi.org/10.1016/S0009-2614(98)01458-4
Y. Danzaki and K. Wagatsuma, "Effect of acid concentrations on the excitation temperature for vanadium ionic lines in inductively coupled plasma–optical emission spectrometry," Analytica Chimica, p. 171–177, 2001.
H. Park, W. Choe, and S. Yoo, "Spatially resolved emission using a geometrydependent system function and its application to excitation temperature pro?le measurement," Atomic Spectroscopy, p. 1029–1032, 2010.
D. Vacher, G. Faure, and P. Andre, "Thermodynamic considerations and optical emission diagnostics of a N2/O2 mixture in an inductively coupled air plasma," Atomic Spectroscopy, pp. 309–330, 2001.
A. Sola, M. Calzada, and A. Gamero, "On the use of the line-to-continuum intensity ratio for determining the electron temperature in a high-pressure argon surface-microwave discharge," Journal of Physics, pp. 1099–1110, 1995.
E. Tognoni, A. C. M. Hidalgo, G. Cristoforetti, S. Legnaioli, A. Salvetti, and V. Palleschi, "Combination of the ionic-to-atomic line intensity ratios from two test elements for the diagnostic of plasma temperature and electron number density in Inductively Coupled Plasma Atomic Emission Spectroscopy," Atomic Spectroscopy, p. 435–443, 2007.
H. Griem, "Stark broadening calculations," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 669–670, 1964.
http://dx.doi.org/10.1016/0022-4073(64)90026-3
J. Camacho, L. Díaz, M. Santos, and J. Poyato, "Time-resolved optical emission spectroscopic measurements of He plasma induced by a high-power CO2 pulsed laser," Atomic Spectroscopy, p. 57–66, 2011.
F. Colao, V. Lazic, R. Fantoni, and S. Pershin, "A comparison of single and double pulse laser-induced breakdown spectroscopy of aluminum samples," Atomic Spectroscopy, pp. 1167–1179, 2002.
H. Griem, Spectral line broadening by plasmas. Academic Pres, New York, 1974.
J. Dennaud, A. Howes, E. Poussel, and J.-M. Mermet, "Study of ionic-toatomic line intensity ratios for two axial viewing-based inductively coupled plasma atomic emission spectrometers," Atomic Spectroscopy, pp. 101–112, 2001.
C. Cali, R. Macaluso, and M. Mosca, "In situ monitoring of pulsed laser indium tin-oxide film deposition by optical emission spectroscopy," Spectrochimica Acta Part B: Atomic Spectroscopy, pp. 56, 743–751, 2001.
A. D. Giacomo, V. Shakhatov, and O. D. Pascale, "Optical emission spectroscopy and modeling of plasma produced by laser ablation of titanium oxides," Atomic Spectroscopy, pp. 56, 753–776, 2001.
S. Qin and A. McTeer, "Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir probe diagnoses," Surface and Coatings Technology, p. 6508–6515, 2007.
http://dx.doi.org/10.1016/j.surfcoat.2006.09.011
A. Kono, "Negative ions in processing plasmas and their effect on the plasma structure," Applied Surface Science, p. 115–134, 2002.
http://dx.doi.org/10.1016/S0169-4332(02)00023-5
C. Seidel, H. Kopf, B. Gotsmann, T. Vieth, H. Fuchs, and K. Reihs, "A plasma treated and Al metallised polycarbonate: a XPS, mass spectroscopy and SFM study," Applied Surface Science, p. 19–33, 1999.
http://dx.doi.org/10.1016/S0169-4332(99)00012-4
K. Warner and G. M.Hieftje, "Review: Thomson scattering from analytical plasmas," Spectrochimica Acta Part B: Atomic Spectroscopy, p. 201–241, 2002.
http://dx.doi.org/10.1016/S0584-8547(01)00372-X
T. Duguet, V. Fournée, J. Dubois, and T. Belmonte, "Study by optical emission spectroscopy of a physical vapour deposition process for the synthesis of complex AlCuFe(B) coatings," Surface and Coatings Technology, pp. 9–14, 2010.
http://dx.doi.org/10.1016/j.surfcoat.2010.05.030
N. H. Bings, A. Bogaerts, and J. A. C. Broekaert, "Atomic Spectroscopy," Analytical Chemistry, p. 4317–4347, 2008.
http://dx.doi.org/10.1021/ac8006297
L. H. Allen, Astrophysics: The Atmosphere of the Sun and Stars. The Ronald Press Co, 1963.
M. de Jong and N. Rowlands, "Proton beam diagnostics using optical spectroscopy, Nuclear Instruments and Methods in Physics Research Section B," Beam Interactions with Materials and Atoms, pp. 822–824, 1985.
G. Zambrano, H. Riascos, P. Prieto, E. Restrepo, A. Devia, and C. Rincón, "Optical emission spectroscopy study of r.f. magnetron sputtering discharge used for multilayers thin film deposition," Surface and Coatings Technology, p. 144–149, 2003.
http://dx.doi.org/10.1016/S0257-8972(03)00339-6
L. García, E. Restrepo, H. Jiménez, H. Castillo, R. Ospina, V. Benavides, and A. Devia, "Diagnostics of pulsed vacuum arc discharges by optical emission spectroscopy and electrostatic double-probe measurements," Vacuum, p. 411–416, 2006.
http://dx.doi.org/10.1016/j.vacuum.2006.06.005
H. Jiménez, E. Restrepo, and A. Devia, "Effect of the substrate temperature in ZrN coatings grown by the pulsed arc technique studied by XRD," Surface and Coatings Technology, p. 1594–1601, 2006.
http://dx.doi.org/10.1016/j.surfcoat.2006.02.030
Y. M. Kim, J. U. Kim, and J. G. Han, "Investigation on the pulsed DC plasma nitriding with optical emission spectroscopy," Surface and Coatings Technology, p. 227–232, 2002.
http://dx.doi.org/10.1016/S0257-8972(01)01601-2
H. Chatei, J. Bougdira, M. Remy, and P. Alnot, "Optical emission diagnostics of permanent and pulsed microwave discharges in H2–CH4–N2 for diamond deposition," Surface and Coatings Technology, p. 1233–1237, 1999.
http://dx.doi.org/10.1016/S0257-8972(99)00109-7
C. Deutsch, "Validity of complete local thermodynamic equilibrium for hei," Physics Letters A, vol. 28, no. 11, pp. 752 – 753, 1969.
http://dx.doi.org/10.1016/0375-9601(69)90602-1
D. Haar, Elements of Statistical Mechanics. Elsevier Science, 1995.
C. Blancard, G. Faussurier, T. Kato, and R. More, "Effective Boltzmann law and Prigogine theorem of minimum entropy production in highly charged ion plasmas," Journal of Quantitative Spectroscopy & Radiative Transfer, p.75–83, 2006.
http://dx.doi.org/10.1016/j.jqsrt.2005.05.006
J. Aguilera and C. Aragón, "Multi-element Saha–Boltzmann and Boltzmann plots in laser-induced plasmas," Atomic Spectroscopy, p. 378–385, 2007.
E. Garber, "Some reactions to Planck's law," Studies in History and Philosophy of Science, pp. 89–126, 1976.
http://dx.doi.org/10.1016/0039-3681(76)90013-3
M. Numano, "Criteria for local thermodynamic equilibrium distributions of populations of excited atoms in a plasma," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 311–317, 1990.
http://dx.doi.org/10.1016/0022-4073(90)90020-7
J. R. J.D. Hey, C.C. Chu, "Partial local thermal equilibrium in a low temperature hydrogen plasma," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 371–387, 1999.
http://dx.doi.org/10.1016/S0022-4073(98)00110-1
R. McWhirter, Plasma Diagnostic Techniques. Academic Press, 1965.
C. Aragón and J. Aguilera, "Characterization of laser induced plasmas by optical emission spectroscopy: A review of experiments and methods," Atomic Spectroscopy, p. 893–916, 2008.
G. Cristoforetti, A. D. Giacomo, M. Dell'Aglio, S. Legnaioli, E. Tognoni, V. Palleschi, and N. Omenetto, "Local Thermodynamic Equilibrium in Laser-Induced Breakdown Spectroscopy: Beyond the McWhirter criterion," Atomic Spectroscopy, p. 86–95, 2010.
Q. A. Wang and A. L. Méhauté, "Nonextensive black-body distribution function and Einstein's coefficients A and B," Physics Letters, pp. 301–306, 1998.
http://dx.doi.org/10.1016/S0375-9601(98)00216-3
L. Cadwell and L. Huwel, "Time-resolved emission spectroscopy in lasergenerated argon plasmas—determination of Stark broadening parameters," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 579–598, 2004.
http://dx.doi.org/10.1016/S0022-4073(03)00106-7
J. H. Dijkstra and C. D. Vries, "Differences in natural widths of conversion lines," Nuclear Physics, pp. 524–531, 1961.
http://dx.doi.org/10.1016/0029-5582(61)90280-2
P. L. Lee, Y. H. Chou, J.-C. Hsieh, and H. K. Chiang, "An improved spectral width Doppler method for estimating Doppler angles in flows with existence of velocity gradients," Ultrasound in Medicine & Biology, pp. 1229–1245, 2006.
http://dx.doi.org/10.1016/j.ultrasmedbio.2006.05.003
V. Milosavljevic, V. Zigman, and S. Djenize, "Stark width and shift of the neutral argon 425.9 nm spectral line," Atomic Spectroscopy, p. 1423– 1429, 2004.
R. Parsons, "A method for the correction of instrumental broadening of a littrow mount grating spectrometer," Infrared Physics & Technology, pp. 197– 198, 1968.
http://dx.doi.org/10.1016/0020-0891(68)90009-2
V. . N. I. of Standards Technology (NIST). (1999).
R. L. Kurucz. (1995) Harvard-Smithsonian Center for Astrophysics.
J. Zhang, L. Liu, and X. D. T. Ma, "Rotational temperature of nitrogen glow discharge obtained by optical emission spectroscopy," Molecular and Biomolecular Spectroscopy, p. 1915–1922, 2002.
J. van Kranendonk, "Rotational and vibrational energy bands in solid hydrogen," Physica, 1959.
http://dx.doi.org/10.1016/0031-8914(59)90027-8
J. Koput, S. Carter, and N. C. Handy, "The vibrational rotational energy levels of silanone," Chemical Physics Letters, pp. 1–9, 1999.
http://dx.doi.org/10.1016/S0009-2614(98)01458-4
Y. Danzaki and K. Wagatsuma, "Effect of acid concentrations on the excitation temperature for vanadium ionic lines in inductively coupled plasma–optical emission spectrometry," Analytica Chimica, p. 171–177, 2001.
H. Park, W. Choe, and S. Yoo, "Spatially resolved emission using a geometrydependent system function and its application to excitation temperature pro?le measurement," Atomic Spectroscopy, p. 1029–1032, 2010.
D. Vacher, G. Faure, and P. Andre, "Thermodynamic considerations and optical emission diagnostics of a N2/O2 mixture in an inductively coupled air plasma," Atomic Spectroscopy, pp. 309–330, 2001.
A. Sola, M. Calzada, and A. Gamero, "On the use of the line-to-continuum intensity ratio for determining the electron temperature in a high-pressure argon surface-microwave discharge," Journal of Physics, pp. 1099–1110, 1995.
E. Tognoni, A. C. M. Hidalgo, G. Cristoforetti, S. Legnaioli, A. Salvetti, and V. Palleschi, "Combination of the ionic-to-atomic line intensity ratios from two test elements for the diagnostic of plasma temperature and electron number density in Inductively Coupled Plasma Atomic Emission Spectroscopy," Atomic Spectroscopy, p. 435–443, 2007.
H. Griem, "Stark broadening calculations," Journal of Quantitative Spectroscopy & Radiative Transfer, pp. 669–670, 1964.
http://dx.doi.org/10.1016/0022-4073(64)90026-3
J. Camacho, L. Díaz, M. Santos, and J. Poyato, "Time-resolved optical emission spectroscopic measurements of He plasma induced by a high-power CO2 pulsed laser," Atomic Spectroscopy, p. 57–66, 2011.
F. Colao, V. Lazic, R. Fantoni, and S. Pershin, "A comparison of single and double pulse laser-induced breakdown spectroscopy of aluminum samples," Atomic Spectroscopy, pp. 1167–1179, 2002.
H. Griem, Spectral line broadening by plasmas. Academic Pres, New York, 1974.
J. Dennaud, A. Howes, E. Poussel, and J.-M. Mermet, "Study of ionic-toatomic line intensity ratios for two axial viewing-based inductively coupled plasma atomic emission spectrometers," Atomic Spectroscopy, pp. 101–112, 2001.