Influence of substrate temperature on the microstructure of TiN/TiC
Main Article Content
Keywords
Pulsed Arc, Microstructure, TiN/TiC, XPS, XRD.
Abstract
TiN/TiC bilayers were deposited using Plasma Assisted Physical Vapor Deposition technique PAPVD)-Pulsed Arc, varying the substrate temperature ina range of 100-120◦C, with intervals of 5◦C. Coatings were analyzed through
XPS and XRD. From signal processing narrow spectrum of XPS and the XRD patterns, was determined the formation of TiN (Titanium Nitride), TiC (Titanium Carbide) and TiCN (Titanium Carbide Nitride) compounds in the
crystallographic.
PACS: 68.35.Ct, 68.55.A-, 68.65.Ac
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References
[1] Jurgen M. Lackner, Wolfgang Waldhauser, Roman Major, Lukasz Major, Boguslaw Major. Interface growth morphologies in pulsed laser deposited, room temperature grown multilayer hard coatings, Surface and Coatings Technology, ISSN 0257-8972, 201, 4090-4093 (2006).
[2] W.H. Kao, Y.L. Su, S.H. Yao. Tribological property and drilling application of Ti-C:H and Cr-C:H coatings on high-speed steel substrates, Vacuum, ISSN 0042- 207X, 80, 604-614 (2006).
[3] A. Devia, Y.C. Arango, D.M. Devia. Implementation of a switched DC arc power supply for the production of hard coatings, Surface and Coatings Technology, ISSN 0257-8972, 201, 2919-2924 (2006).
[4] Y. C. Zhu, K. Yukimura, C. X. Ding, P. Y. Zhang. Tribological properties of nanostructured and conventional WC-Co coatings deposited by plasma spraying, Thin Solid Films, ISSN 0040-6090, 388, 277-282 (2001).
[5] T. Liskiewicz, S. Fouvry , B. Wendler. Development of a Wohler-like approach to quantify the Ti(CxNy) coatings durability under oscillating sliding conditions, Wear, ISSN 0043-1648, 259, 835-841 (2005).
[6] B.H. Lohse, A. Calka., D. Wexler. Effect of starting composition on the synthesis of nanocrystalline TiC during milling of titanium and carbon, Journal of Alloys and Compounds, ISSN 0925-8388, 394, 148-151(2005).
[7] Ning Liu, Weihai Yin, Longwei Zhu. Effect of TiC/TiN powder size on microstructure and properties of Ti(C, N)-based cermets, Materials Science and Engineering A, ISSN 0921-5093, 445-446, 707-716 (2007).
[8] I.W.M. Brown,W.R. Owers. Fabrication, microstructure and properties of Fe-TiC ceramic-metal composites, Current Applied Physics, ISSN1567-1739, 4, 171-174 (2004).
[9] Choi C-H, Hultman L, Barnett SA. Ion-irradiation-induced suppression of threedimensional island formation during InAs growth on Si(100), Journal of vacuum science and technology A, ISSN 0734-2101, 8, 1587 (1990).
[10] H. Leiste, U. Dambacher, S. Ulrich, H. Holleck. Microstructu re and properties of multilayer coatings with covalent bonded hard materials, Surface and Coatings Technology, 0257-8972, 116-119 (1999) 313-320.
[11] A. Devia, E. Restrepo, B. Segura, Y. Arango, D.F. Arias. Study of TiN and Ti/TiN coatings produced by pulsed-arc discharge, Surface and Coatings Technology, ISSN 0257-8972, 190 83-89 (2005).
[12] D. Briggs - M.P. Seah. Practical Surface Analysis, John WILLEY SONS. ISBN 047126279X, Vol. 1, second edition 1993.
[13] D.R. Chopra - Gregory C. Smith - Sunil Kumar. Photoemission study of low pressure chemical vapor deposited and reactively sputtered titanium nitride in W/TiN/Si , Journal of Vacuum Science and Technology B, 1071-1023, 10, N_3, 1218-1220 (1992).
[14] A. Fahlman - C. Nordling - G. Johansson - K. Hamrin. Charge transfer in transition metal carbides and related compounds studied by ESCA, Journal of Physics and Chemistry of Solids, ISSN 0022-3697, 30, 1835-1847 (1969).
[15] T.J. Moravec - T.W. Orent. Electron spectroscopy of ion beam and hydrocarbon plasma generated diamondlike carbon films, Journal of Vacuum Science and Technology, ISSN 0022-5355, 18, N_2, 226-228 (1981).
[16] T. Yamasaki, Y.J. Zheng, Y. Ogino, M. Terasawa, T. Mitamura, T. Fukami. Formation of metal-TiN/TiC nanocomposite powders by mechanical alloying and their consolidation, Materials Science and Engineering A, ISSN 0921-5093, 350 168-172 (2003).
[17] A. Devia, V. Benavides, E. Restrepo, D.F. Arias and R. Ospina. Influence substrate temperature on structural properties of TiN/TiC bilayers produced by pulsed arc techniques, Vacuum, 0042-207X, 81, Issue 3, 24,378-384 (2006).
[18] Base de datos ICSD, Tarjeta 064904.
[19] Base de datos ICSD, Tarjeta 043369.
[20] D.-J. Kim, Y.-R. Cho, M.-J. Lee, J.-M.Hong, Y.-K.Kim, K.-H.Lee. Properties of TiN-TiC multilayer coatings using plasma-assisted chemical vapor deposition, Surface and Coatings Technology, 0257-8972, 116-119 (1999) 906-910.
[21] V. Benavides, E.Restrepo, A.Devia. Study of TiN/TiC bilayers produced by plasma assisted arc vacuum at different temperatures, Physica status solidi (c), ISSN 1610-1642, 2, Issue 10 , 3770 -3773 (2005).
[22] Gosele, U., R.J.B.D, M.C. Flemings and S. Mahajan, Eds. Diffusion-Induced Defects in Silicon, Encyclopedia of advanced materials, Pergamon Press, ISSN 0080406068, 629-6335 (1994).
[23] G. Soto. AES,EELS and XPS characterization of Ti(C,N,O) films prepared by PLD using a Ti target in N2, CH4, O2 and CO as reactive gas, Applied Surface Science, ISSN 0169-4332, 233 115-122 (2004).
[24] X.Ding, B.K.Tay. H.S. Tan, S.P. Lau, W.Y. Cheung, S.P. Wong. Preferential orientation of titanium carbide films deposited by a filtered cathodic vacuum arc technique, Surface and coatings technology, ISSN 0257-8972, 138 301-306 (2001).
[25] Hugh O. Pierson. Handbook of Refractary Carbides and Nitrides. Properties, Characteristics, processing and Aplications, ISSN 1455778168 , Noyes Publications, 49-50 (2000).
[2] W.H. Kao, Y.L. Su, S.H. Yao. Tribological property and drilling application of Ti-C:H and Cr-C:H coatings on high-speed steel substrates, Vacuum, ISSN 0042- 207X, 80, 604-614 (2006).
[3] A. Devia, Y.C. Arango, D.M. Devia. Implementation of a switched DC arc power supply for the production of hard coatings, Surface and Coatings Technology, ISSN 0257-8972, 201, 2919-2924 (2006).
[4] Y. C. Zhu, K. Yukimura, C. X. Ding, P. Y. Zhang. Tribological properties of nanostructured and conventional WC-Co coatings deposited by plasma spraying, Thin Solid Films, ISSN 0040-6090, 388, 277-282 (2001).
[5] T. Liskiewicz, S. Fouvry , B. Wendler. Development of a Wohler-like approach to quantify the Ti(CxNy) coatings durability under oscillating sliding conditions, Wear, ISSN 0043-1648, 259, 835-841 (2005).
[6] B.H. Lohse, A. Calka., D. Wexler. Effect of starting composition on the synthesis of nanocrystalline TiC during milling of titanium and carbon, Journal of Alloys and Compounds, ISSN 0925-8388, 394, 148-151(2005).
[7] Ning Liu, Weihai Yin, Longwei Zhu. Effect of TiC/TiN powder size on microstructure and properties of Ti(C, N)-based cermets, Materials Science and Engineering A, ISSN 0921-5093, 445-446, 707-716 (2007).
[8] I.W.M. Brown,W.R. Owers. Fabrication, microstructure and properties of Fe-TiC ceramic-metal composites, Current Applied Physics, ISSN1567-1739, 4, 171-174 (2004).
[9] Choi C-H, Hultman L, Barnett SA. Ion-irradiation-induced suppression of threedimensional island formation during InAs growth on Si(100), Journal of vacuum science and technology A, ISSN 0734-2101, 8, 1587 (1990).
[10] H. Leiste, U. Dambacher, S. Ulrich, H. Holleck. Microstructu re and properties of multilayer coatings with covalent bonded hard materials, Surface and Coatings Technology, 0257-8972, 116-119 (1999) 313-320.
[11] A. Devia, E. Restrepo, B. Segura, Y. Arango, D.F. Arias. Study of TiN and Ti/TiN coatings produced by pulsed-arc discharge, Surface and Coatings Technology, ISSN 0257-8972, 190 83-89 (2005).
[12] D. Briggs - M.P. Seah. Practical Surface Analysis, John WILLEY SONS. ISBN 047126279X, Vol. 1, second edition 1993.
[13] D.R. Chopra - Gregory C. Smith - Sunil Kumar. Photoemission study of low pressure chemical vapor deposited and reactively sputtered titanium nitride in W/TiN/Si , Journal of Vacuum Science and Technology B, 1071-1023, 10, N_3, 1218-1220 (1992).
[14] A. Fahlman - C. Nordling - G. Johansson - K. Hamrin. Charge transfer in transition metal carbides and related compounds studied by ESCA, Journal of Physics and Chemistry of Solids, ISSN 0022-3697, 30, 1835-1847 (1969).
[15] T.J. Moravec - T.W. Orent. Electron spectroscopy of ion beam and hydrocarbon plasma generated diamondlike carbon films, Journal of Vacuum Science and Technology, ISSN 0022-5355, 18, N_2, 226-228 (1981).
[16] T. Yamasaki, Y.J. Zheng, Y. Ogino, M. Terasawa, T. Mitamura, T. Fukami. Formation of metal-TiN/TiC nanocomposite powders by mechanical alloying and their consolidation, Materials Science and Engineering A, ISSN 0921-5093, 350 168-172 (2003).
[17] A. Devia, V. Benavides, E. Restrepo, D.F. Arias and R. Ospina. Influence substrate temperature on structural properties of TiN/TiC bilayers produced by pulsed arc techniques, Vacuum, 0042-207X, 81, Issue 3, 24,378-384 (2006).
[18] Base de datos ICSD, Tarjeta 064904.
[19] Base de datos ICSD, Tarjeta 043369.
[20] D.-J. Kim, Y.-R. Cho, M.-J. Lee, J.-M.Hong, Y.-K.Kim, K.-H.Lee. Properties of TiN-TiC multilayer coatings using plasma-assisted chemical vapor deposition, Surface and Coatings Technology, 0257-8972, 116-119 (1999) 906-910.
[21] V. Benavides, E.Restrepo, A.Devia. Study of TiN/TiC bilayers produced by plasma assisted arc vacuum at different temperatures, Physica status solidi (c), ISSN 1610-1642, 2, Issue 10 , 3770 -3773 (2005).
[22] Gosele, U., R.J.B.D, M.C. Flemings and S. Mahajan, Eds. Diffusion-Induced Defects in Silicon, Encyclopedia of advanced materials, Pergamon Press, ISSN 0080406068, 629-6335 (1994).
[23] G. Soto. AES,EELS and XPS characterization of Ti(C,N,O) films prepared by PLD using a Ti target in N2, CH4, O2 and CO as reactive gas, Applied Surface Science, ISSN 0169-4332, 233 115-122 (2004).
[24] X.Ding, B.K.Tay. H.S. Tan, S.P. Lau, W.Y. Cheung, S.P. Wong. Preferential orientation of titanium carbide films deposited by a filtered cathodic vacuum arc technique, Surface and coatings technology, ISSN 0257-8972, 138 301-306 (2001).
[25] Hugh O. Pierson. Handbook of Refractary Carbides and Nitrides. Properties, Characteristics, processing and Aplications, ISSN 1455778168 , Noyes Publications, 49-50 (2000).