Influencia de la temperatura del sustrato en la microestructura de recubrimientos de TiN/TiC
Main Article Content
Keywords
Arco pulsado, Microestructura, TiN/TiC, XPS, XRD
Resumen
Las bicapas de TiN/TiC se depositaron utilizando la técnica de deposición en fase vapor asistido por plasma (PAPVD)-Arco Pulsado, variando la temperatura del sustrato en un rango de 100-120±C, con intervalos de 5±C. Los recubrimientos se analizaron por medio de XPS y XRD. A partir del tratamiento de las señales de los espectros angostos de XPS y los patrones de XRD, se determino la formación de los compuestos TiN (Nitruro de Titanio), TiC (Carburo de Titanio) y TiCN (carbonitruro de titanio) en la fase cristalográfica fm-3m correspondiente a las fases FCC de estos compuestos sintetizados.
PACS: 68.35.Ct, 68.55.A-, 68.65.Ac
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Referencias
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[24] X.Ding, B.K.Tay. H.S. Tan, S.P. Lau, W.Y. Cheung, S.P. Wong. Preferential orientation of titanium carbide films deposited by a filtered cathodic vacuum arc technique, Surface and coatings technology, ISSN 0257-8972, 138 301-306 (2001).
[25] Hugh O. Pierson. Handbook of Refractary Carbides and Nitrides. Properties, Characteristics, processing and Aplications, ISSN 1455778168 , Noyes Publications, 49-50 (2000).
[2] W.H. Kao, Y.L. Su, S.H. Yao. Tribological property and drilling application of Ti-C:H and Cr-C:H coatings on high-speed steel substrates, Vacuum, ISSN 0042- 207X, 80, 604-614 (2006).
[3] A. Devia, Y.C. Arango, D.M. Devia. Implementation of a switched DC arc power supply for the production of hard coatings, Surface and Coatings Technology, ISSN 0257-8972, 201, 2919-2924 (2006).
[4] Y. C. Zhu, K. Yukimura, C. X. Ding, P. Y. Zhang. Tribological properties of nanostructured and conventional WC-Co coatings deposited by plasma spraying, Thin Solid Films, ISSN 0040-6090, 388, 277-282 (2001).
[5] T. Liskiewicz, S. Fouvry , B. Wendler. Development of a Wohler-like approach to quantify the Ti(CxNy) coatings durability under oscillating sliding conditions, Wear, ISSN 0043-1648, 259, 835-841 (2005).
[6] B.H. Lohse, A. Calka., D. Wexler. Effect of starting composition on the synthesis of nanocrystalline TiC during milling of titanium and carbon, Journal of Alloys and Compounds, ISSN 0925-8388, 394, 148-151(2005).
[7] Ning Liu, Weihai Yin, Longwei Zhu. Effect of TiC/TiN powder size on microstructure and properties of Ti(C, N)-based cermets, Materials Science and Engineering A, ISSN 0921-5093, 445-446, 707-716 (2007).
[8] I.W.M. Brown,W.R. Owers. Fabrication, microstructure and properties of Fe-TiC ceramic-metal composites, Current Applied Physics, ISSN1567-1739, 4, 171-174 (2004).
[9] Choi C-H, Hultman L, Barnett SA. Ion-irradiation-induced suppression of threedimensional island formation during InAs growth on Si(100), Journal of vacuum science and technology A, ISSN 0734-2101, 8, 1587 (1990).
[10] H. Leiste, U. Dambacher, S. Ulrich, H. Holleck. Microstructu re and properties of multilayer coatings with covalent bonded hard materials, Surface and Coatings Technology, 0257-8972, 116-119 (1999) 313-320.
[11] A. Devia, E. Restrepo, B. Segura, Y. Arango, D.F. Arias. Study of TiN and Ti/TiN coatings produced by pulsed-arc discharge, Surface and Coatings Technology, ISSN 0257-8972, 190 83-89 (2005).
[12] D. Briggs - M.P. Seah. Practical Surface Analysis, John WILLEY SONS. ISBN 047126279X, Vol. 1, second edition 1993.
[13] D.R. Chopra - Gregory C. Smith - Sunil Kumar. Photoemission study of low pressure chemical vapor deposited and reactively sputtered titanium nitride in W/TiN/Si , Journal of Vacuum Science and Technology B, 1071-1023, 10, N_3, 1218-1220 (1992).
[14] A. Fahlman - C. Nordling - G. Johansson - K. Hamrin. Charge transfer in transition metal carbides and related compounds studied by ESCA, Journal of Physics and Chemistry of Solids, ISSN 0022-3697, 30, 1835-1847 (1969).
[15] T.J. Moravec - T.W. Orent. Electron spectroscopy of ion beam and hydrocarbon plasma generated diamondlike carbon films, Journal of Vacuum Science and Technology, ISSN 0022-5355, 18, N_2, 226-228 (1981).
[16] T. Yamasaki, Y.J. Zheng, Y. Ogino, M. Terasawa, T. Mitamura, T. Fukami. Formation of metal-TiN/TiC nanocomposite powders by mechanical alloying and their consolidation, Materials Science and Engineering A, ISSN 0921-5093, 350 168-172 (2003).
[17] A. Devia, V. Benavides, E. Restrepo, D.F. Arias and R. Ospina. Influence substrate temperature on structural properties of TiN/TiC bilayers produced by pulsed arc techniques, Vacuum, 0042-207X, 81, Issue 3, 24,378-384 (2006).
[18] Base de datos ICSD, Tarjeta 064904.
[19] Base de datos ICSD, Tarjeta 043369.
[20] D.-J. Kim, Y.-R. Cho, M.-J. Lee, J.-M.Hong, Y.-K.Kim, K.-H.Lee. Properties of TiN-TiC multilayer coatings using plasma-assisted chemical vapor deposition, Surface and Coatings Technology, 0257-8972, 116-119 (1999) 906-910.
[21] V. Benavides, E.Restrepo, A.Devia. Study of TiN/TiC bilayers produced by plasma assisted arc vacuum at different temperatures, Physica status solidi (c), ISSN 1610-1642, 2, Issue 10 , 3770 -3773 (2005).
[22] Gosele, U., R.J.B.D, M.C. Flemings and S. Mahajan, Eds. Diffusion-Induced Defects in Silicon, Encyclopedia of advanced materials, Pergamon Press, ISSN 0080406068, 629-6335 (1994).
[23] G. Soto. AES,EELS and XPS characterization of Ti(C,N,O) films prepared by PLD using a Ti target in N2, CH4, O2 and CO as reactive gas, Applied Surface Science, ISSN 0169-4332, 233 115-122 (2004).
[24] X.Ding, B.K.Tay. H.S. Tan, S.P. Lau, W.Y. Cheung, S.P. Wong. Preferential orientation of titanium carbide films deposited by a filtered cathodic vacuum arc technique, Surface and coatings technology, ISSN 0257-8972, 138 301-306 (2001).
[25] Hugh O. Pierson. Handbook of Refractary Carbides and Nitrides. Properties, Characteristics, processing and Aplications, ISSN 1455778168 , Noyes Publications, 49-50 (2000).